| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin-film element capable of obtaining high performance, high reliability and cost reduction sufficiently, and the thin-film element, head gimbal assembly using the thin film element, and a hard disk drive. <P>SOLUTION: The method includes a step for forming a stacking body K having electrode films 13, 17 on a substrate S1; a step for forming a thin film element part M on the substrate S1, by processing the stacking body K into a predetermined shape; a step for adhering a support substrate S2 to the substrate S1 with an adhering film 23 so that the support substrate S2 is opposed to the substrate S1 through the thin-film element part M; a step for removing the substrate S1, after the adhering step; a step for forming a low-rigid film 11, on a side where the substrate S1 is removed of the thin-film element part M, after the step for removing the substrate S1; and a step for removing the support substrate S2 and the adherence film 23, after the step for forming the low-rigid film 11. The substrate is not provided on the low-rigid film 11, between the step for forming the low-rigid film 11 and the step for removing the support substrate S2 and the adherence film 23. <P>COPYRIGHT: (C)2011,JPO&INPIT |
