| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source capable of stably operating over a long period of time. <P>SOLUTION: The emitter 11 of the electron source includes a <100> azimuth single crystalline tungsten rod 11a including a tip portion 16 having a ä100}crystal face 16a as an electron-emitting surface 16a at the tip thereof. The electron-emitting surface 16a is coated with a ZrO film to reduce a work function. Auxiliary rods 11b, 11c are attached to the <100> azimuth single crystalline tungsten rod 11. Diffusion sources 12 to supply Zr and O are disposed in the <100> azimuth single crystalline tungsten rod 11a and the auxiliary rods 11b, 11c. The auxiliary rods 11b, 11c form a passage to diffuse and supply Zr and O to the electron-emitting surface 16a, in addition to the outer surface of the <100> azimuth single crystalline tungsten rod 11a. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
