| 发明名称 |
HUMIDIFYING APPARATUS, LITHOGRAPHIC APPARATUS AND HUMIDIFYING METHOD |
| 摘要 |
A humidifying apparatus is disclosed in which gas is provided to a first side of a membrane and liquid to a second side of the same membrane. The membrane is non-porous to the liquid but porous to vapour of the liquid and is liquidphilic to said liquid.
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| 申请公布号 |
US2011074053(A1) |
申请公布日期 |
2011.03.31 |
| 申请号 |
US20100959953 |
申请日期 |
2010.12.03 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VAN DER NET ANTONIUS JOHANNUS |
| 分类号 |
F24F5/00;B01F3/04;F24F6/00;F28F27/00;G03B27/52 |
主分类号 |
F24F5/00 |
| 代理机构 |
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