发明名称 PHOTORESIST STRIPPER COMPOSITION AND PHOTORESIST PEELING METHOD EMPLOYING SAME
摘要 <p>The present invention relates to a photoresist stripper composition. More specifically, the photoresist stripper composition according to the present invention comprises a benzimidazole-based compound and a triazole-based compound, thereby providing the advantage of outstanding photoresist peeling performance and the corrosion preventing power with respect to the photoresist lower film is also outstanding even when molybdenum (Mo) is included in the photoresist lower film.</p>
申请公布号 WO2011037300(A1) 申请公布日期 2011.03.31
申请号 WO2009KR07003 申请日期 2009.11.26
申请人 LG CHEM, LTD.;PARK, MIN-CHOON;MIN, SUNG-JOON;KIM, KYUNG-JUN;HAN, HEE;GOH, WAN-HEE 发明人 PARK, MIN-CHOON;MIN, SUNG-JOON;KIM, KYUNG-JUN;HAN, HEE;GOH, WAN-HEE
分类号 G03F7/42;H01L21/027 主分类号 G03F7/42
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