PHOTORESIST STRIPPER COMPOSITION AND PHOTORESIST PEELING METHOD EMPLOYING SAME
摘要
<p>The present invention relates to a photoresist stripper composition. More specifically, the photoresist stripper composition according to the present invention comprises a benzimidazole-based compound and a triazole-based compound, thereby providing the advantage of outstanding photoresist peeling performance and the corrosion preventing power with respect to the photoresist lower film is also outstanding even when molybdenum (Mo) is included in the photoresist lower film.</p>
申请公布号
WO2011037300(A1)
申请公布日期
2011.03.31
申请号
WO2009KR07003
申请日期
2009.11.26
申请人
LG CHEM, LTD.;PARK, MIN-CHOON;MIN, SUNG-JOON;KIM, KYUNG-JUN;HAN, HEE;GOH, WAN-HEE
发明人
PARK, MIN-CHOON;MIN, SUNG-JOON;KIM, KYUNG-JUN;HAN, HEE;GOH, WAN-HEE