| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which can prevent variation of oscillation frequency and achieve stable airtight sealing. SOLUTION: The piezoelectric device 100 includes a pair of piezoelectric vibrating element mounting pads 111, an element mounting member 110 including a sealing conductor pattern HP surrounding the pair of piezoelectric vibrating element mounting pads 111, and a step part DB surrounding the pair of piezoelectric vibrating element mounting pads 111 provided on the principal surface of the sealing conductor pattern HP, a piezoelectric vibrating element 120 mounted on the piezoelectric vibrating element mounting pads 111 and provided with an electrode 122 for excitation, and a lid body 130 for airtightly sealing the piezoelectric vibrating element 120. The thickness of the step part DB is 15-70μm. COPYRIGHT: (C)2011,JPO&INPIT |
