Semiconductor apparatus and its manufacturing method,申请号EP20080010630-传众专利搜索

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发明名称	Semiconductor apparatus and its manufacturing method
摘要
申请公布号	EP2006905(A3)	申请公布日期	2011.03.30
申请号	EP20080010630	申请日期	2008.06.11
申请人	HITACHI, LTD.	发明人	KAMIOKA, HIDEKAZU;KURITA, SHINICHI;TAKAYANAGI, YUJI
分类号	H01L21/84;H01L21/762;H01L27/12	主分类号	H01L21/84
代理机构		代理人
主权项
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