| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser with a surface relief structure that reduces more variations of device characteristics than conventional lasers. SOLUTION: The surface emitting laser of oscillation wavelength λ includes the surface relief structure and achieves a lateral mode control. The surface relief structure includes: an area of a first laminate on an upper multilayer film reflecting mirror; an area of a second laminate whose optical thickness is larger than that of the first laminate; and an area of a third laminate whose optical thickness is larger than those of the first and second laminates. COPYRIGHT: (C)2011,JPO&INPIT |
