| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump reducing adhesion of adhesive particles to the inside of a pump and eliminating an influence on rotation of a rotor. SOLUTION: This turbo molecular pump includes: the rotor 30 formed with multistage rotary blades 32 and rotated at high speed; a plurality of fixed blades 33 arranged alternately in a pump shaft direction with respect to the rotating blades 32; a plurality of baffle plates 41 provided between a pump inlet 210 and the rotor 30, arranged to form a gas passing area, and catching adhesive particles; and a cooling unit 42 cooling the plurality of baffle plates 41. When the adhesive particles collide with the cooled baffle plates 41, the adhesive particles adhere thereto. Therefore, intrusion of the adhesive particles into the pump can be suppressed. COPYRIGHT: (C)2011,JPO&INPIT |
