| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic wave radiation device with high efficiency of radiation. SOLUTION: The ultrasonic wave radiation device 12 carrying out cleaning of a substrate with ultrasonic wave and cleaning medium includes, at least, a transducer 32 generating the ultrasonic wave and a reflection lens 36 having a paraboloidal surface 36A having a focal point converging the ultrasonic wave generated from the transducer to a predetermined position in a shape of a line. COPYRIGHT: (C)2011,JPO&INPIT
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