发明名称 FABRICATION METHOD OF SEMICONDUCTOR DEVICE HAVING CONDUCTIVE BUMPS
摘要 A semiconductor device having conductive bumps and a fabrication method thereof is proposed. The fabrication method includes the steps of forming a first metallic layer on a substrate having solder pads and a passivation layer formed thereon, and electrically connecting it to the solder pads; applying a second covering layer over exposed parts of the first metallic layer; subsequently, forming a second metallic layer on the second covering layer, and electrically connecting it to the exposed parts of the first metallic layer; applying a third covering layer, and forming openings for exposing parts of the second metallic layer to form thereon a conductive bump having a metallic standoff and a solder material. The covering layers and the metallic layers can provide a buffering effect for effectively absorbing the thermal stress imposed on the conductive bumps to prevent delamination caused by the UBM layers.
申请公布号 US2011070728(A1) 申请公布日期 2011.03.24
申请号 US20100956393 申请日期 2010.11.30
申请人 SILICONWARE PRECISION INDUSTRIES CO., LTD. 发明人 KE CHUN-CHI;HUANG CHIEN-PING
分类号 H01L21/768 主分类号 H01L21/768
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