发明名称 METHOD FOR SCRIBING SUBSTRATE
摘要 <p>PURPOSE: A method for cutting a substrate is provided to reduce the rate of defects during the cutting of a substrate by automatically correcting the defective form of a unit substrate through feedback and management. CONSTITUTION: A supporting unit(121) supports a substrate. A scribing wheel(123) forms a scribe line. A mobile unit(125) transfers the scribing wheel. The scribing wheel forms a scribe line on the substrate which has been placed on the supporting unit. The mobile unit transfers the scribing wheel in a straight line according to a cutting guiding line on the substrate.</p>
申请公布号 KR101023070(B1) 申请公布日期 2011.03.24
申请号 KR20080116647 申请日期 2008.11.24
申请人 发明人
分类号 H01L21/78;C03B33/02;G02F1/13 主分类号 H01L21/78
代理机构 代理人
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