| 摘要 |
PROBLEM TO BE SOLVED: To provide a color code target that facilitates measurement of a reference position of the target, mark detection, and color code identification when an opening is formed at the center. SOLUTION: The color code target TA1 comprises position mark portions including position marks P1 for indicating measurement positions, reference color portions including reference color marks P2 used as chromatic references, color code portions including color code marks P3 for identifying the color code target TA1, and mark separation portions including separation marks that separate the marks in a surface. The position marks P1, the reference color marks P2, and the color code marks P3 are annularly disposed along a circumference of a circle having a center at a reference position C0. An opening H is formed at the reference position C0. The separation marks are disposed so as to have a first predetermined number of the reference color marks P2 interposed therebetween and so as to have a second predetermined number of the color code marks P3 interposed therebetween. COPYRIGHT: (C)2011,JPO&INPIT |
