| 摘要 |
<p>PURPOSE: Additives to silane for a thin film silicon photovoltaic device are provided to add additives to a deposited film to increase a photoconductive property, thereby increasing solar cell efficiency. CONSTITUTION: Straight-chain silane of a higher order includes disilane, trisilane, tetrasilane, penta silane, hexasilane, heptasilane, and a mixture thereof. Cyclic silane is selected from cyclo trisilane, cyclotetra silane, cyclopentasilane, cyclohexa silane, and a mixture thereof. The cyclic silane substituted for silyl is selected from silyl cyclotetra silane, silyl cyclohexa silane, desilyl cyclohexa silane, and a mixture thereof.</p> |
