| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem in the conventional cold spray method that a metal film thick-deposited on the surface of a substrate is easily stripped. SOLUTION: When a metal film is formed on the surface of the substrate according to such the cold spray method that metal particles are sprayed accompanied with an operation gas from a spray nozzle 18 onto the surface of the flat substrate, a distance d between the spray nozzle 18 and the surface of the substrate is kept constant, spray angle θ for the surface of the substrate of the metal particle from the spray nozzle 18 is formed to be an acute angle and is adjusted into such an angle that the metal particle colliding against the surface of the substrate, slides along the surface of the substrate and stops, and the metal particles are sprayed accompanied with the operation gas from the spray nozzle 18 onto the surface of the substrate and, at the same time, the spray nozzle 18 is moved along the surface of the substrate. COPYRIGHT: (C)2011,JPO&INPIT
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