| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generation device with a structure capable of avoiding damages due to heat in a transmission system for transmitting energy of microwaves, and with easy output adjustment. <P>SOLUTION: The plasma generation device includes a microwave generator for generating microwaves, a first waveguide for guiding the microwaves, a cable with a base end for capturing the microwaves and a tip for emitting the captured microwaves, a second waveguide for guiding microwaves emitted from the tip of the cable, an electrode with a base end for capturing microwaves emitted from the tip of the cable, a nozzle body arranged at the tip of the electrode and with an opening for emitting plasma, and a converter converting reflected microwaves reflected on an inner surface of the second waveguide into heat energy. <P>COPYRIGHT: (C)2011,JPO&INPIT |
