| 摘要 |
PROBLEM TO BE SOLVED: To provide a mesh inspection apparatus capable of correctly extracting defects without being affected by a change in the thickness of a mesh width due to the unevenness of etching and printing. SOLUTION: A processing section 3 of the mesh inspection apparatus 1 inputs an image from a line sensor 5 at a resolution at which an image of a mesh in a mesh sheet 10 is captured, preprocesses and corrects shading due to a white LED illumination 7 as a light source, smoothes the preprocessed image, blurs the image so as to prevent the defect from being erroneously detected, extracts the defect in the smoothed image by a threshold, and trims, for example, a 128×128 pixels from the image before smoothing which is centered at a barycenter of the extracted defect. After an area corresponding to a spatial frequency of the mesh in a FFT image of the trimmed image is replaced with 0 and a mesh frequency is removed, an IFFT process is applied. Brightness, a shape and an area of the defect are determined from the obtained image, and then the results are output. COPYRIGHT: (C)2011,JPO&INPIT |
