| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating element of long life and low manufacturing cost which, as a corrosion resistant layer whose resistivity and hardness are adjusted is formed on a protective layer, avoids degradation due to corrosion of a conductive layer, especially a power feeding terminal, even under the environment of high temperature and corrosive gas, and demonstrates a function as an electrostatic chuck even if a chuck pattern is provided. SOLUTION: A heating element 10 comprises at least a heat resistant base material 1, a conductive layer 3 comprising a heater pattern 3a formed on the heat resistant base material, and an insulating protective layer 4 formed on the conductive layer. A corrosion resistant layer 4p consisting of a compound containing a third element is provided at least on the protective layer 4. COPYRIGHT: (C)2008,JPO&INPIT |
