PROCESS FOR PRODUCING SUBSTRATE AND COMPOSITION FOR USE IN SAME

摘要

An inexpensive and easy process for producing a substrate is provided in which warpage or torsion can be more effectively avoided. Also provided is a composition for use in the process. The process for substrate production is characterized by comprising (a) a step in which a composition for film formation comprising a precursor for a polymer containing a heterocycle and an organic solvent is applied to a support and dried to form a coating film, (b) a cyclization step in which the coating film is heated at a temperature which is between the temperature lower by 60ºC than the glass transition temperature of the heterocycle-containing polymer and the temperature higher by 20ºC than the glass transition temperature of the heterocycle-containing polymer to cyclize the precursor for the heterocycle-containing polymer, a step (c) in which an element is formed on the film obtained in the cyclization step, and (d) a step in which the film having the element formed thereon is separated from the support, the heterocycle-containing polymer being at least one polymer which has a glass transition temperature in the range of 230-420ºC and is selected from a group consisting of polyimides, polybenzoxazole, polybenzothiazole, and polybenzimidazole.