| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lift pin holding mechanism for elastically holding an axial direction position of the lift pin, capable of achieving stable retracting movement against touch pressure. <P>SOLUTION: String-like elastic bodies (1 in Fig.1) are arranged on both the sides of the lift pin approximately vertically relative to the axis of the lift pin, and pressure units (2, 3 in Fig.1) are arranged in the vicinity of four corners of the periphery of the lift pin while facing the outsides of the string-like elastic bodies arranged on both the sides of the lift pin. One pressure unit (2 in Fig.1) is fixed on a lift pin holding plate A and the other pressure unit (3 in Fig.1) is fixed on a lift pin holding plate B. By sliding both or either one of the lift pin holding plates A, B, both the string-like elastic bodies are nipped by the pressure units from the outsides and the lift pin is nipped and held by the string-like elastic bodies. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
