发明名称 DEVICE AND METHOD FOR PROCESSING WORKPIECE
摘要 PROBLEM TO BE SOLVED: To provide a device and a method for processing a workpiece, capable of processing a workpiece in a truncated conical shape obtained by cutting the tip of a conical shape end part into a columnar shape in a short time for processing without losing a part other than the columnar shape as a grinding powder. SOLUTION: The device for processing a workpiece includes at least a table for mounting a workpiece in a truncated conical shape, a core bit which is disposed over the workpiece mounted on the table, is in a cylindrical shape, has a grindstone on the tip, and can be rotated around a center axis, a driving motor for transmitting a driving force to the core bit and rotating it, and a feed mechanism for moving the core bit in the vertical direction relatively to the workpiece, wherein the core bit is cut and fed downward relatively by the feed mechanism while being rotated by the driving motor, the grindstone of the core bit is abutted to the workpiece mounted on the table, and the workpiece is hollowed into a columnar shape. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011049195(A) 申请公布日期 2011.03.10
申请号 JP20090193869 申请日期 2009.08.25
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 KITAMICHI HIROAKI;KAMISAKA TOSHIAKI;HIRANO YOSHIHIRO;NISHINO HIDEHIKO
分类号 H01L21/304;B23B51/04;B24B19/02;B24B27/033;B28D1/14 主分类号 H01L21/304
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