EXPOSURE APPARATUS, AND EXPOSURE METHOD AND METHOD FOR MANUFACTURING DISPLAY PANEL SUBSTRATE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an exposure apparatus capable of enhancing the productivity by extending the lifetime of a light source including a plurality of lamps and reducing the times of maintenance, and to provide an exposure method and a method for manufacturing a display panel substrate using the apparatus.

SOLUTION: The exposure apparatus includes a light source including a plurality of lamps 131-1 and 131-2, a plurality of power supplies 141-1 and 141-2 respectively supplying electric power to the plurality of lamps, a power supply controlling device 140 controlling the plurality of power supplies, and a chuck 110 to mount a substrate 101 coated with a photosensitive resin material, wherein the power controlling device 140 controls the plurality of power supplies 141-1 and 141-2 in such a manner that the electric power supplied to the plurality of lamps 131-1 and 131-2 is equalized and constant.

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