| 摘要 |
PROBLEM TO BE SOLVED: To efficiently clean a filter for filtering carbon dioxide in a gas, a liquid or a supercritical state used at least either for cleaning or for drying a body to be treated. SOLUTION: The cleaning method of a filter for filtering carbon dioxide in a gas, a liquid or a supercritical state used at least either for cleaning or for drying a body to be treated includes cleaning of a filter 13 by circulating carbon dioxide to the filter 13 before filtering carbon dioxide in a gas, a liquid or a supercritical state at the filter 13. COPYRIGHT: (C)2011,JPO&INPIT
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