发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To solve a problem wherein, in a conventional semiconductor device, it becomes difficult to form a normal contact and a shared contact at the same time, and a junction leak failure and increase of contact resistance occur, and the like. SOLUTION: This semiconductor device includes: a sidewall 9 formed on a sidewall of a gate wire 6 of a logic SRAM part; a doped polysilicon 18 for electrically connecting a silicide layer 13 formed on a surface of a diffusion layer 11 to a silicide layer 15 of the gate wire 6; a W plug 26 for electrically connecting the doped polysilicon 18 to a first layer aluminum wire; and a W plug 25 for electrically connecting the silicide layer on the surface of the diffusion layer 11 of the logic SRAM part to the first layer aluminum wire. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011049601(A) 申请公布日期 2011.03.10
申请号 JP20100270455 申请日期 2010.12.03
申请人 RENESAS ELECTRONICS CORP 发明人 AMOU JUN;KIMURA MASATOSHI
分类号 H01L27/11;H01L21/28;H01L21/768;H01L21/8242;H01L21/8244;H01L23/522;H01L27/10;H01L27/108 主分类号 H01L27/11
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