| 摘要 |
<p>A testing apparatus is provided with: a positional information acquiring section which acquires positional information of a plurality of first terminals provided on a surface of a device to be tested and positional information of a plurality of second terminals provided on a surface of a probe card to be used for testing the device to be tested; a control section, which calculates displacement quantities between the first terminals and the respective corresponding second terminals, based on the positional information of the first terminals and the positional information of the second terminals acquired by the positional information acquiring section, and determines relative positions of the device to be tested and the probe card so as to have the maximum value of the displacement quantities smaller than a predetermined value; and an aligning section which adjusts the relative positions of the device to be tested and the probe card, based on a signal transmitted from the control section, and electrically connects the device to be tested and the probe card to each other.</p> |
