发明名称 |
METHOD FOR MANUFACTURING A PHOTOVOLTAIC CELL STRUCTURE |
摘要 |
In the frame of manufacturing a photovoltaic cell a layer (3) of silicon compound is deposited on a structure (1). The yet uncovered surface (3a) is treated in a predetermined oxygen (O2) containing atmosphere which additionally contains a dopant (D). Thereby, the silicon compound layer is oxidized and doped in a thin surface area (5).
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申请公布号 |
US2011057276(A1) |
申请公布日期 |
2011.03.10 |
申请号 |
US20090921823 |
申请日期 |
2009.09.07 |
申请人 |
OERLIKON SOLAR AG, TRUEBBACH |
发明人 |
MEIER JOHANNES;BRONNER MARKUS;KUPICH MARKUS;ROSCHEK TOBIAS;GOLDBACH HANNO |
分类号 |
H01L31/0256;H01L31/076;H01L31/077 |
主分类号 |
H01L31/0256 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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