发明名称 METHOD FOR MANUFACTURING A PHOTOVOLTAIC CELL STRUCTURE
摘要 In the frame of manufacturing a photovoltaic cell a layer (3) of silicon compound is deposited on a structure (1). The yet uncovered surface (3a) is treated in a predetermined oxygen (O2) containing atmosphere which additionally contains a dopant (D). Thereby, the silicon compound layer is oxidized and doped in a thin surface area (5).
申请公布号 US2011057276(A1) 申请公布日期 2011.03.10
申请号 US20090921823 申请日期 2009.09.07
申请人 OERLIKON SOLAR AG, TRUEBBACH 发明人 MEIER JOHANNES;BRONNER MARKUS;KUPICH MARKUS;ROSCHEK TOBIAS;GOLDBACH HANNO
分类号 H01L31/0256;H01L31/076;H01L31/077 主分类号 H01L31/0256
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