| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-frequency device having a membrane structure with an improved mechanical strength. <P>SOLUTION: A stopper layer 12 (first dielectric layer) and a dielectric layer 13 (second dielectric layer) acting as an element forming layer are provided in this order on a substrate 11 having an opening 15, and a high-frequency element 14 (inductor) is provided on the dielectric layer 13 in a position opposing the opening 15. In the opening 15, a reinforcing structure 18 is provided simultaneously when the opening 15 is formed by patterning the substrate 11. The reinforcing structure 18 has a pattern that divides the inside of the opening 15 into a plurality of regions. The stopper layer 12 prevents the dielectric layer 13 from being damaged when etching the substrate 11, and the reinforcing structure 18 increases the mechanical strength of a membrane 17. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
