HYDROGEN GAS SENSOR AND OXYGEN CONCENTRATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor capable of detecting low-concentration hydrogen in the air containing oxygen. SOLUTION: The hydrogen gas sensor includes: a board-like piezoelectric body 11; a thin film-shaped gas sensitive part 32 arranged on a part of the surface of the piezoelectric body 11, and composed of a palladium-platinum alloy; and a comb tooth-shaped electrode 22 functioning as a detection part for detecting a change of a physical property of the gas sensitive part 32 depending on a hydrogen concentration of gas in contact with the gas sensitive part 32. COPYRIGHT: (C)2011,JPO&INPIT