发明名称 METHOD FOR SEPARATING SILICON SOLAR CELLS
摘要 <p>In a method for separating silicon solar cells, a groove is introduced into a silicon wafer containing the silicon solar cells along a separating line in a front side of the silicon wafer adjacent to a p-n junction in the silicon wafer using a first laser beam. The groove has a depth reaching at least to the p-n junction and extends to a lateral edge of the silicon wafer. In a second work step, the silicon wafer is cut along the separating line starting at the lateral edge using a second laser beam directed into the groove. Wherein the melt arising during the cutting is driven out of the cutting kerf arising during the cutting using a cutting gas flowing at least approximately in the direction of the second laser beam.</p>
申请公布号 EP2291867(A1) 申请公布日期 2011.03.09
申请号 EP20100719944 申请日期 2010.05.17
申请人 ROFIN-BAASEL LASERTECH GMBH&CO. KG 发明人 MAYERHOFER, ROLAND
分类号 H01L31/18 主分类号 H01L31/18
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