发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a manufacturing method thereof are provided to increase the area of an active region by including an active pattern on both sidewall of a trench. CONSTITUTION: A trench(25) is formed on a substrate(21). A first device isolation layer(27A) partially fills the trench. An active pattern(28) is formed on both sidewalls of the trench on the first device isolation layer. A protection layer(29A) is interposed between the second device isolation layer and the active pattern.
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申请公布号 |
KR20110024547(A) |
申请公布日期 |
2011.03.09 |
申请号 |
KR20090082585 |
申请日期 |
2009.09.02 |
申请人 |
MAGNACHIP SEMICONDUCTOR, LTD. |
发明人 |
CHOI, MYUNG GYU |
分类号 |
H01L21/76 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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