发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to increase the area of an active region by including an active pattern on both sidewall of a trench. CONSTITUTION: A trench(25) is formed on a substrate(21). A first device isolation layer(27A) partially fills the trench. An active pattern(28) is formed on both sidewalls of the trench on the first device isolation layer. A protection layer(29A) is interposed between the second device isolation layer and the active pattern.
申请公布号 KR20110024547(A) 申请公布日期 2011.03.09
申请号 KR20090082585 申请日期 2009.09.02
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 CHOI, MYUNG GYU
分类号 H01L21/76 主分类号 H01L21/76
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