| 摘要 |
PROBLEM TO BE SOLVED: To perform high-speed etching for forming a ridge type optical waveguide, thereby exhibiting high mass productivity. SOLUTION: The method of manufacturing the wavelength conversion element includes a step of forming a plurality of grooves 24-1 to 24-5 having different depths on a first main surface 22a of a substrate 22 of a first ferroelectric crystal in which periodic polarization reversal structure is formed by a voltage application method, a step of laminating the first main surface of the substrate of the first ferroelectric crystal to a main surface 28a of a substrate 28 of a second ferroelectric crystal, and a step of starting polishing from a second main surface 22b of the substrate of the first ferroelectric crystal, finishing the polishing when an index groove previously selected from the plurality of grooves appears, and forming the ridge type optical waveguide. COPYRIGHT: (C)2011,JPO&INPIT |
