发明名称 OPTICAL APPARATUS, AND METHOD OF ORIENTING A REFLECTIVE ELEMENT.
摘要 An optical apparatus has a moveable reflective element and associated actuator. The actuator includes a first magnet which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable reflective element to move, and a second magnet which is connected to a motor such that operation of the motor will cause the second magnet to move. The second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.
申请公布号 NL2004527(A) 申请公布日期 2011.02.28
申请号 NL20102004527 申请日期 2010.04.09
申请人 ASML NETHERLANDS B.V., 发明人 BUIS, EDWIN;VRIES, GOSSE;BOON, FIDELUS
分类号 G03F7/20 主分类号 G03F7/20
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