| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement apparatus capable of measuring the shape of a surface to be measured in a short time while suppressing a manufacturing cost. <P>SOLUTION: The measurement apparatus for measuring the surface shape of a surface to be measured includes: an optical system for allowing a measurement light beam to be incident on the surface of the surface to be measured, and a reference light beam to be incident on a reference surface, and guiding first and second measurement light beams reflected at first and second measurement points in a local region of the surface to be measured and first and second reference light beams reflected at first and second reference points corresponding to the two measurement points into the first and second regions of the image pickup element; and a processing part for calculating the height of the surface to be measured in the local region on the basis of the strength of an interference light detected by the image pickup element and formed by the first and second measurement light beams in the first and second regions and the first and second reference light beams. The measurement apparatus is arranged so that the differences may be generated among optical path differences between the first measurement light beams and the first reference light beams and the optical path differences between the second measurement light beams and the second reference light beams. <P>COPYRIGHT: (C)2011,JPO&INPIT |
