发明名称 METHOD FOR MANUFACTURING A SILICON SURFACE WITH PYRAMIDAL TEXTURE
摘要 The invention relates to a method for manufacturing a silicon surface with a pyramidal structure, in which a silicon wafer containing the silicon surface is dipped into an etching solution. To produce a pyramidal structure that is as homogeneous as possible, according to the invention it is proposed that the silicon surface be treated with ozone prior to coming into contact with the etching solution.
申请公布号 US2011045673(A1) 申请公布日期 2011.02.24
申请号 US20090736026 申请日期 2009.03.12
申请人 RENA GMBH 发明人 SCHWECKENDIEK JUERGEN;ELJAOUHARI AHMED ABDELBAR
分类号 H01L21/306 主分类号 H01L21/306
代理机构 代理人
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