| 摘要 |
PROBLEM TO BE SOLVED: To provide a method that facilitates manufacturing a diffraction grating resistant to a temperature change. SOLUTION: A silicon type solution having a ladder-type crosslinking reactivity is applied onto a rugged surface of a prescribed mother mold 1 to form an SOG solution layer 2 on the rugged surface. A substrate 3 is placed on the SOG solution layer 2, thereafter, a solvent of the SOG solution layer 2 is vaporized and, at the same time, the ladder-type crosslinking reaction is caused in the SOG solution layer 2 to solidify the SOG solution layer 2. Thereby, the SOG solution layer 2 is changed into a diffraction pattern layer 12 having a rugged surface complementary to the rugged surface of the mother mold 1 and a composite material 10 made by adhering the diffraction pattern layer 12 onto the substrate 3 is provided. The composite material 10 is stripped from the mother mold 1 and the diffraction grating is obtained. By using the silicon type solution having a ladder-type crosslinking reactivity, the diffraction grating resistant to a temperature change like a glass product can be easily manufactured. COPYRIGHT: (C)2011,JPO&INPIT
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