METHOD OF COOLING A MICROWAVE PLASMA

摘要

The method involves partially cooling a dielectric tube (16) by a coolant flowing in thermal contact with an outer wall of the tube to be cooled. The coolant flows in a direction opposite to that of a fluid or a fluid mixture in the dielectric tube, where the coolant includes oil selected from linear alpha-polyolefins having a carbonated chain of 14 carbon atoms or 1-Tetradecene and/or perfluorocarbonated liquids having a dielectric constant lower than 2.5, a microwave absorbance comprised between 0.01 et 0.0001, and a specific heat Cp less than 0.6 gram calorie per gram degree Celsius. An independent claim is also included for a plasma processing system comprising a fluid and /or gas injection units.