发明名称 RAMAN AND PHOTOLUMINESCENCE SPECTROSCOPY
摘要 PURPOSE: A Raman and photoluminescence spectrum system is provided to enable another range of characterization of a sample to become accurate since it is possible to use concurrent Raman and PL spectrum and thereafter, there is no need for data to be associated. CONSTITUTION: A Raman and photoluminescence spectrum system(120) comprises an aperture, a spectrum element, a first arrangement detector(131), a second arrangement detector(132) and a curved mirror(123). The aperture is located to receive light, which includes a plurality of wave components, comprising a photoluminescence wavelength component and a Raman shift component, from a sample. The spectrum element is located on the optical path of the light. The spectrum element is set to disperse the wave component of the light to a space. The first arrangement detector receives the Raman shift component. The first arrangement detector is located to generate one or more signals, which represent the intensity of the Raman shift component.
申请公布号 KR20110015666(A) 申请公布日期 2011.02.16
申请号 KR20110004004 申请日期 2011.01.14
申请人 WAFERMASTERS, INCORPORATED 发明人 YOO, WOO SIK
分类号 G01N21/62;G01N21/65 主分类号 G01N21/62
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