MEASURING DEVICE AND MEASURING METHOD FOR INSPECTING THE SURFACE OF A SUBSTRATE,申请号KR20087026796-传众专利搜索

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发明名称	MEASURING DEVICE AND MEASURING METHOD FOR INSPECTING THE SURFACE OF A SUBSTRATE
摘要
申请公布号	KR101014121(B1)	申请公布日期	2011.02.14
申请号	KR20087026796	申请日期	2007.11.06
申请人		发明人
分类号	G01R31/304;G01R27/26	主分类号	G01R31/304
代理机构		代理人
主权项
地址

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