SETTER FOR MANUFACTURING CERAMIC AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A method for manufacturing a setter for manufacturing ceramic is provided to simplify whole manufacturing processes and to enable both side use of the setter by forming a zirconia coating layer at both sides of an alumina support. CONSTITUTION: A method for manufacturing a setter(34) for manufacturing ceramic comprises the steps of: a first slurry containing alumina(Al2O3) and a second slurry containing zirconia(ZrO2); respectively applying the first slurry and the second slurry on a base film; removing the base film after drying to prepare an alumina tape and a zirconia tape; forming an alumina stack by laminating plural alumina tapes and laminating plural zirconia tapes on the alumina stack; and heat-compressing, plasticizing, and degreasing the alumina stack and the zirconia stack to form an alumina support(30) and a coating layer(32).