发明名称 NITRIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a nitride semiconductor device reducing a gate leakage current when a bias direction bias is applied to a gate electrode. <P>SOLUTION: The nitride semiconductor device has a semiconductor layer laminate 103 comprising a first nitride semiconductor layer 104 and a second nitride semiconductor layer 105, which are sequentially formed on a substrate 101. A p-type third nitride semiconductor layer 108 is selectively formed on the semiconductor layer laminate 103, and a gate electrode 109 is formed on the third nitride semiconductor layer 108. A first ohmic electrode 106 and a second ohmic electrode 107 are formed on both sides of the third nitride semiconductor layer 108 on the semiconductor layer laminate 103. The first gate electrode 109 is brought into Schottky contact with the third nitride semiconductor 108. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011029247(A) 申请公布日期 2011.02.10
申请号 JP20090170847 申请日期 2009.07.22
申请人 PANASONIC CORP 发明人 SHIBATA DAISUKE;YANAGIHARA MANABU;UEMOTO YASUHIRO
分类号 H01L29/812;H01L21/28;H01L21/338;H01L29/417;H01L29/778 主分类号 H01L29/812
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