发明名称 |
IN-LINE METROLOGY METHODS AND SYSTEMS FOR SOLAR CELL FABRICATION |
摘要 |
In-line metrology methods and systems for use with laser-scribing systems used in solar-cell fabrication are disclosed. Such methods and systems can involve a variety of components, for example, a device for measuring the amount of power input to a laser, a power meter for measuring laser output power, a beam viewer for measuring aspects of a laser beam, a height sensor for measuring a workpiece height, a microscope for measuring workpiece features formed by the laser-scribing system, and a system for monitoring a laser-scribing system and annunciating a warning(s) and/or an error message(s) when operational limits are exceeded. In-line metrology methods can also include the processing of output beam reflections so as to track beam drift over time and/or provide for focusing of an imaging device. |
申请公布号 |
WO2011017570(A2) |
申请公布日期 |
2011.02.10 |
申请号 |
WO2010US44618 |
申请日期 |
2010.08.05 |
申请人 |
APPLIED MATERIALS, INC.;MANENS, ANTOINE P.;SHIU, TING-RUEI;SHAMOUN, BASSAM;HSU, WEI-YUNG;THOTHADRI, MANIVANNAN |
发明人 |
MANENS, ANTOINE P.;SHIU, TING-RUEI;SHAMOUN, BASSAM;HSU, WEI-YUNG;THOTHADRI, MANIVANNAN |
分类号 |
H01L31/18;B23K26/36;H01L31/042;H01S3/10 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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