发明名称 TRAP APPRATUS
摘要 PURPOSE: A collecting device including a guiding plate is provided to improve the collection rate of un-reacted gas by extending the reaction time, and to minimize the amount of the un-reacted gas. CONSTITUTION: A collecting device including a guiding plate comprises the following: a housing(510) including a gas inlet(521) and a gas outlet(522); plural collection units(540a,540b) installed in the inside of the housing, to collect un-reacted gas by evaporating; and the guiding plate(550) inducing the zig-zag flow of the un-reacted gas by being installed on one inside of the housing among the collection units.
申请公布号 KR20110012652(A) 申请公布日期 2011.02.09
申请号 KR20090070466 申请日期 2009.07.31
申请人 THERMTECS CO., LTD. 发明人 KIM, KYUNG MIN
分类号 B01D46/00;H01L21/02 主分类号 B01D46/00
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