摘要 |
PURPOSE:To supply a section between spare electrodes and a section between main electrodes with a fresh mixed gas, to discharge electricity excellently, to omit a circulating fan and to miniaturize a laser oscillator by constituting one of the spare electrodes by a gas nozzle consisting of a conductive material and feeding the section between the main electrodes with the mixed gas supplied through the gas nozzle. CONSTITUTION:A large number of spare capacitors 7 are disposed along one side of a main electrode 4 on an upper partition wall 3, and spare electrodes 8 are each fitted at the lower end sections of the capacitors. On the other hand, gas nozzles 9 consisting of a conductive material such as a copper alloy are mounted along one side of a main electrode 4 only by the same number as the spare electrodes 8 on a lower partition wall 3, and the noses of respective gas nozzle 9 are arranged toward the clearances of a pair of the upper and lower main electrodes 4 while regular intervals are shaped among the noses of each gas nozzle 9 and the spare electrodes 8. Each gas nozzle 9 functioning as discharge electrodes, pairing with the spare electrodes A respectively and constituting one part of a mixed gas feeder 10 is connected to one common conduit 11 and led out to the outside of a case 2, and the noses of the gas nozzles 9 are connected to a gas cylinder 12 into which a mixed gas is pressure-accumulated. |