发明名称 PRESSURE-RESISTANT CHAMBER
摘要 PURPOSE: A pressure-resistant chamber is provided to efficiently utilize inner space as working space. CONSTITUTION: A chamber frame(1) has an opening space(10) of a quadratic section shape at an inner portion thereof, and plural reinforcing frames(2) are installed at an external side of the chamber frame. A chamber body(3) is installed at an opening space of the chamber frame. The rest portion except the upper portion is plugged up. A pressure seal member is installed between the opening space of the chamber frame and the chamber body.
申请公布号 KR20110012659(A) 申请公布日期 2011.02.09
申请号 KR20090070475 申请日期 2009.07.31
申请人 PARK, WOONG KI 发明人 PARK, WOONG KI
分类号 G02F1/1339;G02F1/13;H01L21/68 主分类号 G02F1/1339
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