PLASMA PULSE POWER SUPPLY WITH CURRENT SOURCE FOR REDUCING THE SWITCHING LOSS

摘要

PURPOSE: A pulse power supply device is provided to improve the reliability of a device by using a low loss switching method. CONSTITUTION: A rectifier(10) rectifies an inputted AC signal. A filter part(20) filters a signal which is outputted from the rectifier. A switching loss attenuation part(30) comprises a switch between a condenser and an inductor. A pulse output part(50) comprises four switching devices formed in a H bridge form. The pulse output part converts the signal that is outputted from the filter part into a pulse signal according to the switching control signal of a control part. A current source part(40) is serially connected between the lower terminal of the switching loss attenuation part and the lower terminal of the pulse output part. A diode is formed between a first node and a second node. The control part(60) controls the switching operation of the switching loss reducing part and the pulse output part.