| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric-pressure plasma generating method and device wherein atmospheric-pressure plasma, capable of plasma treatment in a distance direction and in a wide range in plane with respect to a reaction space where the plasma is generated, can be generated by a small input power. <P>SOLUTION: A first inert gas 5 is supplied to a reaction space 1 and a high frequency electric field is impressed from a high frequency power source 4, thereby, primary plasma 6 formed by turning the first inert gas into plasma is blown off from the reaction space 1; then, in order to collide with this primary plasma 6, a mixed gas region 10 in which a mixed gas 8 produced by mixing a second inert gas as a main constituent and a proper amount of a reactive gas exists is formed, and secondary plasma 11 formed by turning the mixed gas into plasma is generated. <P>COPYRIGHT: (C)2011,JPO&INPIT |
