TOOL FOR ANODIZATION AND NANO-MACHINING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a nano-machining method of forming uniform unevenness on the surface of a substrate by an anodization. SOLUTION: A mask material coating film formed on the surface of the substrate is anodized to form a hole to leave at least a part of the bottom and next, a mask for etching is formed by immersing into a liquid to dissolve the mask coating film to dissolve and remove the bottom part of the hold to form a through hole. The tool for anodization comprises a first and second electrically insulating plate 1, 4 between which the substrate is held and an electrode 2 for anodization which is in contact with the film to be oxidized on the surface of the substrate. The first electrically insulating plate positioned on the surface of the substrate has a window part 6 formed so that a prescribed place of the substrate surface is exposed to the anodization liquid and the electrode is brought into contact with the whole periphery of the exposed part by the window part. The electrode comprises a metallic material having the same quality as the film to be oxidized. COPYRIGHT: (C)2011,JPO&INPIT