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发明名称
Heating apparatus
摘要
申请公布号
EP2045834(B1)
申请公布日期
2011.02.02
申请号
EP20080252981
申请日期
2008.09.09
申请人
NGK INSULATORS, LTD.
发明人
MORIOKA, IKUHISA;TSURUTA, HIDEYOSHI;AIHARA, YASUFUMI
分类号
H01L21/00;H01L21/683;H01L21/687;H02N13/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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