发明名称 Semiconductor Device and Method of Fabricating the Same
摘要 Provided are a semiconductor device and a method of fabricating the same. The semiconductor device includes a first interconnection disposed on a substrate. The interconnection includes a first silicon interconnection region and a first metal interconnection region sequentially stacked on the substrate. A second interconnection includes a second silicon interconnection region and a second metal interconnection region that are stacked sequentially. The second silicon interconnection region has a lower resistivity than the first silicon interconnection region.
申请公布号 US2011020993(A1) 申请公布日期 2011.01.27
申请号 US20100827375 申请日期 2010.06.30
申请人 PARK JONG-MAN;YAMADA SANTORU 发明人 PARK JONG-MAN;YAMADA SANTORU
分类号 H01L21/8234 主分类号 H01L21/8234
代理机构 代理人
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