METHOD OF MANUFACTURING MICROSTRUCTURE, LIGHT EMITTING DIODE WITH MICROSTRUCTURE MANUFACTURED BY THE METHOD, MICROSTRUCTURE, AND LIGHT EMITTING DIODE WITH THE MICROSTRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a microstructure capable of improving light extraction efficiency.SOLUTION: The method of manufacturing the microstructure includes the processes of: forming a first light shield mask pattern 15 on a surface of a translucent substrate 6 having a light emitting part irradiated with light to emit light; forming a first photopolymerizable material film 16 which has a photopolymerizable property on a surface of the substrate 6 so as to cover the first light shield mask pattern 15; forming a first translucent film pattern which has a translucent property by patterning the first photopolymerizable material film 16 using the light shield mask pattern 15 as a mask; forming a second light shield mask pattern on the first translucent film pattern; forming a second photopolymerizable material film on the surface of the substrate 6 so as to cover the second light shield mask pattern; and forming a second translucent film pattern which has a translucent property on an upper surface of the first translucent film pattern by patterning the second photopolymerizable material film.