| 摘要 |
PROBLEM TO BE SOLVED: To prevent rotation of a substrate during vapor growth.SOLUTION: A restricting jig installing portion 11 for installing a restricting jig 10 is set on a holder 2, and a slope 12 lower in a substrate 4 side is set on the bottom surfaces of the restricting jig 10 and the restricting jig installing portion 11. With this configuration, when the substrate 4 spreads outward, the restricting jig 10 moves upward on the slope 12 to relieve a force applied to the substrate 4, and when a clearance is caused between the substrate 4 and the restricting jig 10 by the movement, the restricting jig 10 moves downward on the slope 12 to restrict the substrate 4. Thus, the rotation of the substrate 4 can be prevented while preventing damage of the substrate 4. |
